محاسبه ظرفیت و حساسیت کرنشی خازن اینتردیجیتال با استفاده از مولتی فیزیک انسیس

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شرح پروژه

ابتدا شبیه سازی مکانیکی انجام شده و نتیجه آن برای شبیه سازی الکترواستاتیکی و محاسبه ظرفیت خازن استفاده می شود.  نمونه مشابه در متن زیر و مقاله پیوست آورده شده است.

The finite-elements method (FEM) was chosen for the numerical calculation of the sensor capacitance and strain sensitivity. We performed coupled mechanical and electrostatic simulations with the finite-element-simulation software ANSYS. Figure 4 exhibits the meshed 3-D FEM model of the sensor electrodes on a foil substrate, mounted on a test specimen with an adhesive layer. The picture illustrates the geometric and material-dependent arrangement of the brick elements. In the mechanical part of the simulation, different strains in the specimen were defined as the mechanical loads of the system. The FEM model consists of three-dimensional, eight-node elements of the type SOLID185. After the mechanical simulation, the resulting deformed elements were transformed into electrostatic elements of type SOLID69. The materials parameters, utilzied for the simulations, are presented in Table 1. The FEM software computes the capacitance of the strain gauge on the basis of the distribution of the electrostatic field in the dielectric material for a given voltage. Figure 5 shows the contour plot of results for an electrostatic simulation of the finger structures. The concentration of the electrostatic field between the electrodes is illustrated in this figure. One can deduce from this illustration that the effect of capacitance change due to strain is maximized in areas where the maximum electric field is located.

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